Handbook of Ion SourcesThe Handbook of Ion Sources delivers the data needed for daily work with ion sources. It also gives information for the selection of a suitable ion source and ion production method for a specific application. The Handbook concentrates on practical aspects and introduces the principle function of ion sources. The basic plasma parameters are defined and discussed. The working principles of various ion sources are explained, and examples of each type of ion source are presented with their operational data. Tables of ion current for various elements and charge states summarize the performance of different ion sources. The problems related to the production of ions of non-gaseous elements are detailed, and data on useful materials for evaporation and ion source construction are summarized. Additional chapters are dedicated to extraction and beam formation, ion beam diagnosis, ion source electronics, and computer codes for extraction, acceleration, and beam transport. Emittance and brilliance are described and space charge effects and neutralization discussed. Various methods for the measurement of current, profile, emittance, and time structure are presented and compared. Intensity limits for these methods are provided for different ion energies. Typical problems related to the operation of ion source plasmas are discussed and practical examples of circuits are given. The influence of high voltage on ion source electronics and possibilities for circuit protection are covered. The generation of microwaves and various microwave equipment are described and special problems related to microwave operation are summarized. The Handbook of Ion Sources is a valuable reference on the subject, of benefit to practitioners and graduate students interested in accelerators, ion implantation, and ion beam techniques. |
Contents
Introduction | 2 |
Chapter | 7 |
Brown | 20 |
Chapter 3 | 114 |
INTRODUCTION | 121 |
Production of Ions from Nongaseous Materials | 331 |
Chapter 4 | 351 |
Beam Formation and Transport | 365 |
Ion Beam Diagnosis | 385 |
Chapter 6 | 453 |
Chapter 7 | 519 |
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Common terms and phrases
accelerator angular intensity anode aperture atoms axial B. H. Wolf beam current beam intensity cathode cesium Conf cooling current density cyclotron Deliverer or user diameter discharge chamber distribution duoplasmatron EBIS ECR Ion Sources efficiency electric field electron beam electron volts elements emission emittance energy spread Equation evaporation Faraday cup filament focusing frequency gas pressure GFIS grid heated hydrogen Instrum INSULATOR ion beam ion current ion implantation Ion source material ionization potential laser LMIS magnetic field magnetron material and vacuum maximum measured metal ion Methods microwave multicusp needle negative ions negative-ion production negative-ion source neutral Nucl operation optical oven parameters particles permanent magnets Phys potential power supply Proc pulse radius Reference rf ion sources shown in Figure slit solenoid space charge sputter sputter deposition switch tantalum target Technol temperature thermal tube tungsten vacuum arc voltage waveguide wire
References to this book
Nuclear Instruments & Methods in Physics Research: Beam ..., Volumes 188-189 No preview available - 2002 |