Mems

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Tata McGraw-Hill Education, Feb 7, 2008 - Microelectromechanical systems - 500 pages
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MEMS are small and integrated devices, which combine electronics, electrical as well as mechanical elements to meet the control related functional requirements. This book synergistically covers the aspects of multidisciplinary subjects by providing the proof-of-principle, concepts, design, development and applications of MEMS.
 

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mems

Contents

Introduction
1
Micromachining
34
Chapter3 System Modeling and Properties of Material
81
Passive Components and Systems
108
Mechanical Sensors and Actuators
138
Thermal Sensors and Actuators
175
Microoptoelectromechanical Systems
209
Magnetic Sensors and Actuators
242
Chemical and Biomedical Microsystems
338
CNT and Nanotechnology
368
Simulation Based Micro and Nanosystem Design
392
Performance Indices and Device Array
422
Appendix A
448
Appendix C
455
Appendix E
462
Appendix F
468

Radio Frequency RF MEMS
279
Microfluidic Systems
312

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