Thin-Film Deposition: Principles and Practice

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McGraw Hill Professional, Mar 22, 1995 - Technology & Engineering - 616 pages
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Thin film deposition is a broad and burgeoning field, with applications ranging from razor blade coatings to quantum-well lasers. However much of the available thin film literature is based on empirical knowledge and focuses only on specific processes or applications.

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ThinFilm Technology
Gas Kinetics
Vacuum Technology

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