Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabricationPart of a compilation of diverse information into a single, two-volume resource just at the moment when researchers are weighing the alternatives to visible light that will be necessary to etch features smaller than 0.13 microns. Volume Two focuses on the process technology and the device applicatio |
Contents
MICROMACHINING AND TRENDS FOR THE TWENTYFIRST CENTURY 3 | 31 |
| 41 | |
CHAPTER 2 | 43 |
APPLICATIONS OF DRY ETCHING TO MICROSENSORS FIELD EMITTERS 66 | 99 |
FOCUSED ION BEAMS FOR MICROMACHINING AND MICROCHEMISTRY | 153 |
PLATING TECHNIQUES | 197 |
Suggested Further Reading | 288 |
HIGH ASPECT RATIO PROCESSING | 299 |
Other editions - View all
Handbook of Microlithography, Micromachining, and Microfabrication ... P. Rai-Choudhury Limited preview - 1997 |
Handbook of Microlithography, Micromachining, and Microfabrication ... P. Rai-Choudhury Limited preview - 1997 |
Common terms and phrases
achieved active addition applications array aspect ratio beam bonding chemical chip circuit concentrations deep density dependent deposition developed devices diffusion discussed distribution effect electrical electrodeposition electron electroplating elements emitter etch rate example fabrication field Figure flow frequency function higher IEEE important increased integrated lateral layer less LIGA limited lines lithography machining magnetic manufacturing mask mass material measured mechanical MEMS metal microelectronics micromachining microstructures mirror mold needed obtained operation optical oxide pattern performance plasma plating PMMA possible pressure Proc produce range reduced regions removed resist rf power sample selectivity sensors Sensors and Actuators shown in Fig shows signal silicon solution steps stress structures substrate surface technique temperature thermal thickness thin tool typically vertical voltage wafer wide x-ray