Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication
Part of a compilation of diverse information into a single, two-volume resource just at the moment when researchers are weighing the alternatives to visible light that will be necessary to etch features smaller than 0.13 microns. Volume Two focuses on the process technology and the device applicatio
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accelerometer achieved Actuator Workshop anisotropic anisotropic etching applications array aspect ratio biomedical bulk micromachining cantilever capacitive cell chemical chip circuitry CMOS current density deposition developed devices diaphragm dielectric diffusion dry etching ECR source electrical Electrochem electrodeposition electroforming electroless electronics electroplating electrostatic emitter tips etch rate etchants fabrication fiber Figure flow Focused Ion Beam frequency high aspect ratio IEEE implantable integrated circuit L.T. Romankiw laser machining magnetic mask material measured mechanical membrane MEMS metal Micro microelectronics microstructures microwave power mirror mold inserts mTorr optical optical fiber output oxide packaging pattern Permalloy photoresist piezoelectric pixel plasma plating PMMA polyimide polymer polysilicon probe Proc produce resist resonant rf power scanning seed layer Sensors and Actuators shown in Fig sidewall signal silicon SiO2 Solid-State Sensors solution sputtering structures substrate surface micromachining switch technique temperature thermal thickness transducers typically valve vertical voltage wafer waveguide x-ray lithography