Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication

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SPIE Press, 1997 - Microfabrication - 692 pages
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Part of a compilation of diverse information into a single, two-volume resource just at the moment when researchers are weighing the alternatives to visible light that will be necessary to etch features smaller than 0.13 microns. Volume Two focuses on the process technology and the device applicatio

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